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- Wafer inspection system(SBS-300+)
Wafer inspection system(SBS-300+)
SBS-300+
![](../Upload/images/Produce/Automation/SBS-300Plus/SBS-300plus-1.png)
Features:
Semi-auto Wafer inspection after sawing
Easy to operate by Chinese/English HMI
Auto Load/Unload Port
Auto wafer position alignment
Auto wafer transportation
Auto X-Y stage for wafer inspection
Wafer are selectable in cassette
Sawing Lane running path selected
For both 8” & 12” wafer
High Magnification Camera
![](../Upload/images/Produce/Automation/SBS-300Plus/SBS-300plus-2.jpg) Inspection stage | ![](../Upload/images/Produce/Automation/SBS-300Plus/SBS-300plus-3.jpg) Transportation |
General specification:
Wafer type
8” & 12” wafer with frame
Wafer Cassette Load/Unload port
8” and 12” wafer cassette
Wafer protection
Work-holder station
Programmable X-Y-θ table
Inspection system
High Magnification Camera module
Operation interface (HMI)
Chinese/English switch
Wafer set up
Joystick function