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Wafer inspection system(SBS-300+)




  • Semi-auto Wafer inspection after sawing

  • Easy to operate by Chinese/English HMI

  • Auto Load/Unload Port

  • Auto wafer position alignment

  • Auto wafer transportation

  • Auto X-Y stage for wafer inspection

  • Wafer are selectable in cassette

  • Sawing Lane running path selected

  • For both 8” & 12” wafer

  • High Magnification Camera


Inspection stage



General specification:

Wafer type
8” & 12” wafer with frame

Wafer Cassette Load/Unload port
8” and 12” wafer cassette
Wafer protection

Work-holder station
Programmable X-Y-θ table

Inspection system
High Magnification Camera module

Operation interface (HMI)
Chinese/English switch
Wafer set up
Joystick function