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Wafer skeleton inspection（WS-100）

WS-100

 

 

Features：

  • Auto load wafer

  • Wafer expansion

  • Read wafer ID

  • Load wafer mapping data

  • Line-scan camera

  • Skeleton die inspection

  • Analysis and show result

  • Mapping rotation is workable

  • 8”←→12” by change kit



Specification

Inspection Module

Vision system
Line-scan camera 16K pixel
Light source
Red light

Wafer Handling

Working type
Wafer with frame
Wafer size capability
8”; 12”
Load port
Single 8” ,12” Framed-wafer cassette
Handling
Gripper / Rail

System Dimension

Dimensions (L x W x H)
1500 mm x 1800 mm x 2000 mm
Wieght
1300 Kg
   
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