 | - Applicable Products:
- 6-inch bare wafers, 8-inch frame-on wafers, 12-inch metal frames.
- CO₂ Main Unit:
- Process Parameters:
- CDA pressure control, nozzle motion control.
- ESD Protection:
- Monitoring Functions:
- CO₂ snow status, indoor CO₂ concentration, CDA flow rate, CO₂ remaining volume.
- Clean Airflow System:
- Dust collection hood, 2 sets of HEPA filters, 1 additional blower unit.
- Machine Dimensions:
- 1500W × 1200L × 1800H (mm)
- Facility Requirements:
- 220V, 1P, 20A; CDA: 0.5 MPa, 100 LPM; Ø300 mm exhaust duct
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